IEEE Transactions on Semiconductor Manufacturing
Abbreviated title (ISO 4) | IEEE Trans. Semicond. Manuf. |
|---|---|
| Discipline | Semiconductor device fabrication |
| Language | English |
| Edited by | Anthony Muscat |
| Publication details | |
| Publisher | |
Publication history | 1988–present |
| Frequency | Quarterly |
| 0.977 | |
| Indexing | |
| ISSN |
0894-6507 (print) 1558-2345 (web) |
| LCCN | 88659341 |
| OCLC no. | 16152423 |
| Links | |
The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Anthony Muscat (University of Arizona). According to the Journal Citation Reports, the journal has a 2013 impact factor of 0.977.[1]
The journal is a joint publication of the
- IEEE Solid-State Circuits Society
- IEEE Components, Packaging & Manufacturing Technology Society
- IEEE Electron Devices Society
- IEEE Reliability Society
References
- ↑ "IEEE Transactions on Semiconductor Manufacturing". 2013 Journal Citation Reports. Web of Science (Science ed.). Thomson Reuters. 2014.
External links
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