HARMST
HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies, used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
See also
- LIGA
- Advanced Silicon Etch
- Deep Reactive Ion Etching
- Micromechanical Systems — High Aspect Ratio (HAR) Micromachining
References
This article is issued from Wikipedia - version of the 8/7/2016. The text is available under the Creative Commons Attribution/Share Alike but additional terms may apply for the media files.